Surface micromachined electrostatically actuated micro peristaltic pump
نویسندگان
چکیده
منابع مشابه
Surface micromachined electrostatically actuated micro peristaltic pump.
An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied ...
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ژورنال
عنوان ژورنال: Lab on a Chip
سال: 2004
ISSN: 1473-0197,1473-0189
DOI: 10.1039/b403906h